The paper presents a novel hybrid-switched-capacitor voltage regulator module design with Zero-Voltage-Switching intermediate voltage rails for CPU power supply. This approach combines a switched-capacitor stage to split the input voltage into multiple square-wave voltage rails, along with a multiphase buck stage connected in parallel at the output terminal. The proposed topology improves the component utilization and enhances the power density by integrating flying capacitors as input filters for the buck stage and reusing switches for both two stages. An inductor-capacitor network controls the slew rate of each intermediate voltage rail and enables Zero-Voltage-Switching for the switched-capacitor stage. Moreover, this design is scalable to a wide range of input voltages and output currents. The operational principle of this topology is introduced, and a 1-MHz/2-rail-2-phase prototype for 12-V-to-1-V is built to verify the design’s performance. The peak efficiency is 91.5% at 30 A and the full-power efficiency is 85.7% at 80 A.